MPX7050D Просмотр технического описания (PDF) - Motorola => Freescale

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MPX7050D

50 kPa High Zin, On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensor

Motorola => Freescale 

LINEARITY

Linearity refers to how well a transducer’s output follows

the equation: Vout = Voff + sensitivity x P over the operating

pressure range. There are two basic methods for calculating

nonlinearity: (1) end point straight line fit (see Figure 2) or (2)

a least squares best line fit. While a least squares fit gives

the “best case” linearity error (lower numerical value), the

calculations required are burdensome.

Conversely, an end point fit will give the “worst case” error

(often more desirable in error budget calculations) and the

calculations are more straightforward for the user. Motorola’s

specified pressure sensor linearities are based on the end

point straight line method measured at the midrange

pressure.

LEAST SQUARES FIT

EXAGGERATED

PERFORMANCE

CURVE

MPX7050 SERIES

LEAST

SQUARE

DEVIATION

STRAIGHT LINE

DEVIATION

END POINT

STRAIGHT LINE FIT

OFFSET

0

50

100

PRESSURE (% FULLSCALE)

Figure 2. Linearity Specification Comparison

ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION

Figure 3 shows the output characteristics of the MPX7050

series at 25°C. The output is directly proportional to the dif-

ferential pressure and is essentially a straight line.

The effects of temperature on Full Scale Span and

Offset are very small and are shown under Operating

Characteristics.

40 VS = 10 Vdc

35 TA = 25°C

30 P1 > P2

TYP

25

20

MAX

15

10

MIN

5

0

–5

kPa 0

PSI

12.5

25

37.5

1.83

3.63

5.44

SPAN

RANGE

ÉÉÉÉÉÉÉÉÉÉÉ (TYP)

WIRE BOND

SILICONE

DIE COAT DIE

P1

STAINLESS STEEL

METAL COVER

EPOXY

CASE

ÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉ LEAD FRAME

OFFSET

ÉÉÉÉÉÉÉÉÉÉÉ 50

(TYP)

DIFFERENTIAL/GAUGE ELEMENT

RTV DIE

BOND

7.3

P2

Figure 3. Output versus Pressure Differential

Figure 4. Cross–Sectional Diagram

(not to scale)

Figure 4 illustrates the differential or gauge configuration

in the basic chip carrier (Case 344–15). A silicone gel iso-

lates the die surface and wire bonds from the environment,

while allowing the pressure signal to be transmitted to the sil-

icon diaphragm.

The MPX7050 series pressure sensor operating charac-

teristics and internal reliability and qualification tests are

based on use of dry air as the pressure media. Media other

than dry air may have adverse effects on sensor perfor-

mance and long term reliability. Contact the factory for in-

formation regarding media compatibility in your application.

Motorola Sensor Device Data

3

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