Freescale Semiconductor
Technical Data
Low G
Micromachined Accelerometer
The MMA series of silicon capacitive, micromachined accelerometers
features signal conditioning, a 2--pole low pass filter and temperature
compensation. Zero--g offset full scale span and filter cut--off are factory set and
require no external devices. A full system self--test capability verifies system
functionality.
Features
• Integral Signal Conditioning
• Linear Output
• 2nd Order Bessel Filter
• Calibrated Self--test
• EPROM Parity Check Status
• Transducer Hermetically Sealed at Wafer Level for Superior Reliability
• Robust Design, High Shock Survivability
Typical Applications
• Vibration Monitoring and Recording
• Appliance Control
• Mechanical Bearing Monitoring
• Computer Hard Drive Protection
• Computer Mouse and Joysticks
• Virtual Reality Input Devices
• Sports Diagnostic Devices and Systems
ORDERING INFORMATION
Device
Temperature Range
MMA1260D
--40 to +105°C
Case No.
Case 475--01
Package
SOIC--16
MMA1260D
Rev. 1, 10/2004
MMA1260D
MMA1260D: Z AXIS SENSITIVITY
MICROMACHINED
ACCELEROMETER
±1.5g
16
9
1
8
16 LEAD SOIC
CASE 475--01
Pin Assignment
VSS
1
VSS
2
VSS
3
VOUT
4
STATUS
5
VDD
6
VSS
7
ST
8
16
N/C
15
N/C
14
N/C
13
N/C
12
N/C
11
N/C
10
N/C
9
N/C
SIMPLIFIED ACCELEROMETER FUNCTIONAL BLOCK DIAGRAM
VDD
G--CELL
SENSOR
INTEGRATOR
GAIN
FILTER
TEMP COMP
& GAIN
VOUT
ST
SELF--TEST
CONTROL LOGIC &
EPROM TRIM CIRCUITS
OSCILLATOR
CLOCK GEN.
VSS
STATUS
Figure 1. Simplified Accelerometer Functional Block Diagram
REV 1
© Freescale Semiconductor, Inc., 2004. All rights reserved.
Sensor Device Data
Freescale Semiconductor
MMA1260D
1